Data processing techniques for ion and electron-energy distribution functions
نویسندگان
چکیده
Retarding field energy analyzers and Langmuir probes are routinely used to obtain ion electron distribution functions (IEDF, EEDF). These typically require knowledge of the first second derivatives I-V characteristics, both which can be obtained in various ways. This poses challenges inherent differentiating noisy signals, a frequent problem with electric-probe plasma diagnostics. A brief review commonly analog numerical filtering differentiation techniques is presented, together their application on experimental data collected radio-frequency plasma. The each method detailed regards IEDF EEDF, deduced parameters, dynamic range, resolution signal distortion.
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ژورنال
عنوان ژورنال: Physics of Plasmas
سال: 2023
ISSN: ['1070-664X', '1527-2419', '1089-7674']
DOI: https://doi.org/10.1063/5.0133840